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Choose an ion and a target, then Calculate table.
Add one or more implant energies and press Calculate profile.
Choose the ion, its energy and a layer, then Calculate energy loss.
Define the ion and the target layers, then Run TRIM.
Add ions and targets (elements or compounds) to compare their stopping powers, ranges and straggling.
About LunaSRIM
LunaSRIM is a Python 3 re-implementation of SRIM-2013 by J.F. Ziegler, J.P. Biersack and M.D. Ziegler, obtained by reverse engineering TRIM.exe and SRModule.exe. Every calculation on this site runs that Python code:
- Stopping & Range: the SR module's stopping powers (SRIM-2013 electronic stopping, ZBL nuclear stopping) and its range/straggling integration. The tables are identical to SRModule.exe output.
- TRIM Monte Carlo: the full TRIM-2013 algorithm (MAGIC scattering integral, electronic energy loss with straggling, Kinchin-Pease or full damage cascades, sputtering). Ion by ion it reproduces TRIM.exe, including its output files, which you can download.
- Energy loss: the energy of a beam after a layer and its energy straggling (σ, FWHM) from the SRIM stopping power and TRIM's straggling model (Bohr), with the exit energy distribution and depth profiles. Not part of SRIM's programs: an analytical calculation with the same physics.
- Implantation: implant depth profiles from projected range and straggling, multi-energy (box) implants, and range curves for elements or any of SRIM's 350 compounds.
The Physics page describes the models behind these calculations, with their formulas.
The Python package can also be used directly:
# from the repository pip install . # TRIM calculation python -m lunasrim TRIM.IN # stopping / range table python -m lunasrim SR.IN # this web application python -m lunasrim.web
Please cite SRIM when publishing results: J.F. Ziegler, M.D. Ziegler, J.P. Biersack, SRIM – The stopping and range of ions in matter (2010), Nucl. Instr. Meth. B 268 (2010) 1818.