# www.neaspec.com
# Scan:	 	Fourier Scan
# Project:	 	nanoFTIR-QualityControl
# Description:	 	NeaSpec-Slow-Arrowhead-Clean-REV2-45avg
# Date:	 	05/19/2024 16:59:10
# Scanner Center Position (X, Y):	[µm]	46.77	49.79	 
# Rotation:	[°]	0	 	 
# Scan Area (X, Y, Z):	[µm]	0.000	0.000	0.000
# Pixel Area (X, Y, Z):	[px]	2	1	3
# Interferometer Center/Distance:	[µm]	470.000	490.000	 
# Averaging:	 	2	 	 
# Integration time:	[ms]	20	 	 
# Wavenumber Scaling:	 	1.003656	 	 
# Laser Source:	 	
# Detector:	 	R
# Target Wavelength:	[µm]		 	 
# Demodulation Mode:	 	Fourier
# Tip Frequency:	[Hz]	68,263.500	 	 
# Tip Amplitude:	[mV]	339.702	 	 
# Tapping Amplitude:	[nm]	76.233	 	 
# Modulation Frequency:	[Hz]	0.000	 	 
# Modulation Amplitude:	[mV]	0.000	 	 
# Modulation Offset:	[mV]	0.000	 	 
# Setpoint:	[%]	80.49	 	 
# Regulator (P, I, D):	 	3.767854	6.228756	1.000000
# Tip Potential:	[mV]	0.000	 	 
# M1A Scaling:	[nm/V]	1.520	 	 
# M1A Cantilever Factor:	 	2.066	 	 
# Q-Factor:	 	221.1	 	 
# Version:	 	2.1.11508.0
Row	Column	Run	Depth	Z	M	O0A	O0P	O1A	O1P	O2A	O2P	O3A	O3P	O4A	O4P	O5A	O5P	
0	0	0	0	1.4195246E-06	0.0002253487	233.41681	0	14.466169	2.4147859	9.580825	-1.4510685	3.1200895	0.95955217	1.3408793	-2.8969262	0.6398502	-0.53890413	
0	0	0	1	1.4195394E-06	0.00022605936	225.92825	0	14.5146475	2.4173899	9.592879	-1.4507022	3.1344879	0.9692281	1.3316284	-2.8742592	0.56832266	-0.47886258	
0	0	0	2	1.4195472E-06	0.0002265469	222.50809	0	14.548334	2.4175787	9.569336	-1.4517778	3.0889504	0.96725243	1.3630728	-2.9196901	0.64972746	-0.54219437	
0	0	1	0	1.4195246E-06	0.0002253487	233.41681	0	14.466169	2.4147859	9.580825	-1.4510685	3.1200895	0.95955217	1.3408793	-2.8969262	0.6398502	-0.53890413	
0	0	1	1	1.4195394E-06	0.00022605936	225.92825	0	14.5146475	2.4173899	9.592879	-1.4507022	3.1344879	0.9692281	1.3316284	-2.8742592	0.56832266	-0.47886258	
0	0	1	2	1.4195472E-06	0.0002265469	222.50809	0	14.548334	2.4175787	9.569336	-1.4517778	3.0889504	0.96725243	1.3630728	-2.9196901	0.64972746	-0.54219437	
0	1	0	0	1.4195246E-06	0.0002253487	233.41681	0	14.466169	2.4147859	9.580825	-1.4510685	3.1200895	0.95955217	1.3408793	-2.8969262	0.6398502	-0.53890413	
0	1	0	1	1.4195394E-06	0.00022605936	225.92825	0	14.5146475	2.4173899	9.592879	-1.4507022	3.1344879	0.9692281	1.3316284	-2.8742592	0.56832266	-0.47886258	
0	1	0	2	1.4195472E-06	0.0002265469	222.50809	0	14.548334	2.4175787	9.569336	-1.4517778	3.0889504	0.96725243	1.3630728	-2.9196901	0.64972746	-0.54219437	
0	1	1	0	1.4195246E-06	0.0002253487	233.41681	0	14.466169	2.4147859	9.580825	-1.4510685	3.1200895	0.95955217	1.3408793	-2.8969262	0.6398502	-0.53890413	
0	1	1	1	1.4195394E-06	0.00022605936	225.92825	0	14.5146475	2.4173899	9.592879	-1.4507022	3.1344879	0.9692281	1.3316284	-2.8742592	0.56832266	-0.47886258	
0	1	1	2	1.4195472E-06	0.0002265469	222.50809	0	14.548334	2.4175787	9.569336	-1.4517778	3.0889504	0.96725243	1.3630728	-2.9196901	0.64972746	-0.54219437	