FileVersion 1 2;
FileTimestamp 08-12-24 23:41:25;
InspectionStationID "KLA-Tencor" "SP7" "SP7-61";
SampleType WAFER;
ResultTimestamp 08-12-24 23:40:18;
LotID "MBXJA-0P018760EP7R205J";
SampleSize 1 300;
DeviceID "None";
SetupID "EP7R2XXX" 08-12-24 23:20:53;
StepID "EP7R2XXX";
SampleOrientationMarkType NOTCH;
OrientationMarkLocation DOWN;
DiePitch 3.0000000000e+05 3.0000000000e+05;
DieOrigin 0.0000000000e+00 0.0000000000e+00;
WaferID "BW0835606546";
Slot 2;
SampleCenterLocation 1.5000000000e+05 1.5000000000e+05;
OrientationInstructions "Front ";
CoordinatesMirrored NO; 
InspectionOrientation DOWN;
InspectionTest 4;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
InspectionTest 6;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
InspectionTest 7;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
InspectionTest 8;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
InspectionTest 9;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
InspectionTest 13;
SampleTestPlan 1
  0 0 ;
AreaPerTest 6.9279200000e+10;
DefectRecordSpec 170 DEFECTID XREL YREL XINDEX YINDEX XSIZE YSIZE DEFECTAREA DSIZE CLASSNUMBER TEST CLUSTERNUMBER ROUGHBINNUMBER FINEBINNUMBER REVIEWSAMPLE ADCSIZE ADCSIZE_DN_OBLIQUE ADCSIZE_DW1_OBLIQUE ADCSIZE_DW2_OBLIQUE CLASSCODE_DN_OBLIQUE CLASSCODE_DW1_OBLIQUE CLASSCODE_DW2_OBLIQUE COLUMNINDEX_DN_OBLIQUE COLUMNINDEX_DW1_OBLIQUE COLUMNINDEX_DW2_OBLIQUE ENCENERGY_DN_OBLIQUE ENCENERGY_DW1_OBLIQUE ENCENERGY_DW2_OBLIQUE HAZEAVERAGE_DN_OBLIQUE HAZEAVERAGE_DW1_OBLIQUE HAZEAVERAGE_DW2_OBLIQUE INDEX1_DN_OBLIQUE INDEX1_DW1_OBLIQUE INDEX1_DW2_OBLIQUE INDEX2_DN_OBLIQUE INDEX2_DW1_OBLIQUE INDEX2_DW2_OBLIQUE LPDE1 LPDE2 LPDE3 LPDE4 LPMHAZEAVERAGEADC_DN_OBLIQUE LPMHAZEAVERAGEADC_DW1_OBLIQUE LPMHAZEAVERAGEADC_DW2_OBLIQUE LPMMAXADC LPMMAXADC_DN_OBLIQUE LPMMAXADC_DW1_OBLIQUE LPMMAXADC_DW2_OBLIQUE LPMMAXAMPLITUDE LPMMAXAMPLITUDE_DN_OBLIQUE LPMMAXAMPLITUDE_DW1_OBLIQUE LPMMAXAMPLITUDE_DW2_OBLIQUE LPMMAXAMPLITUDENPPM LPMMAXAMPLITUDENPPM_DN_OBLIQUE LPMMAXAMPLITUDENPPM_DW1_OBLIQUE LPMMAXAMPLITUDENPPM_DW2_OBLIQUE LPMMAXAMPLITUDERPPM LPMMAXAMPLITUDERPPM_DN_OBLIQUE LPMMAXAMPLITUDERPPM_DW1_OBLIQUE LPMMAXAMPLITUDERPPM_DW2_OBLIQUE LPMMAXSNR LPMMAXSNR_DN_OBLIQUE LPMMAXSNR_DW1_OBLIQUE LPMMAXSNR_DW2_OBLIQUE LPMTRIGGERED_DN_OBLIQUE LPMTRIGGERED_DW1_OBLIQUE LPMTRIGGERED_DW2_OBLIQUE NPPMSIZE NPPMSIZE_DN_OBLIQUE NPPMSIZE_DW1_OBLIQUE NPPMSIZE_DW2_OBLIQUE POSITION_RCENTROID POSITION_THETACENTROID RPPMHAZEAVERAGE_DN_OBLIQUE RPPMHAZEAVERAGE_DW1_OBLIQUE RPPMHAZEAVERAGE_DW2_OBLIQUE RPPMSIZE RPPMSIZE_DN_OBLIQUE RPPMSIZE_DW1_OBLIQUE RPPMSIZE_DW2_OBLIQUE DEFECTSIZE SIZE_DN_OBLIQUE SIZE_DN_OBLIQUE_TO_SIZE_DW1_OBLIQUE SIZE_DN_OBLIQUE_TO_SIZE_DW2_OBLIQUE SIZE_DW1_OBLIQUE SIZE_DW1_OBLIQUE_TO_SIZE_DN_OBLIQUE SIZE_DW1_OBLIQUE_TO_SIZE_DW2_OBLIQUE SIZE_DW2_OBLIQUE SIZE_DW2_OBLIQUE_TO_SIZE_DN_OBLIQUE SIZE_DW2_OBLIQUE_TO_SIZE_DW1_OBLIQUE SN_RATIO SN_RATIO_DN_OBLIQUE SN_RATIO_DW1_OBLIQUE SN_RATIO_DW2_OBLIQUE AREA ASPECT_RATIO POSITION_BOX_REND POSITION_BOX_RSTART POSITION_BOX_THETAEND POSITION_BOX_THETASTART LENGTH HAZEAVERAGE CLASSCODE COLUMNINDEX ENCENERGY INDEX1 INDEX2 LPMHAZEAVERAGEADC LPMTRIGGERED ROWINDEX RPPMHAZEAVERAGE ADCSIZE_PCC_OBLIQUE CLASSCODE_PCC_OBLIQUE COLUMNINDEX_PCC_OBLIQUE DEFECTSIZENEGADC_PCC_OBLIQUE DEFECTSIZEPOSADC_PCC_OBLIQUE DEFECTSIZESHE_PCC_OBLIQUE ENCENERGY_PCC_OBLIQUE HAZEAVERAGE_PCC_OBLIQUE INDEX1_PCC_OBLIQUE INDEX2_PCC_OBLIQUE LATERALEXTENTRADIALNEGUM_PCC_OBLIQUE LATERALEXTENTRADIALPOSUM_PCC_OBLIQUE LATERALEXTENTRADIALUM_PCC_OBLIQUE LATERALEXTENTTANGENTIALNEGUM_PCC_OBLIQUE LATERALEXTENTTANGENTIALPOSUM_PCC_OBLIQUE LATERALEXTENTTANGENTIALUM_PCC_OBLIQUE LPMHAZEAVERAGEADC_PCC_OBLIQUE LPMMAXADC_PCC_OBLIQUE LPMMAXAMPLITUDE_PCC_OBLIQUE LPMMAXAMPLITUDENPPM_PCC_OBLIQUE LPMMAXAMPLITUDERPPM_PCC_OBLIQUE LPMMAXSNR_PCC_OBLIQUE LPMTRIGGERED_PCC_OBLIQUE NPPMSIZE_PCC_OBLIQUE PCCADCRATIO_PCC_OBLIQUE PCCBCKGRNDINTENSITYADC_PCC_OBLIQUE PCCNUMCLUSTEREDDEFECTS_PCC_OBLIQUE PPD_POLARITY POLARITY_PCC_OBLIQUE POSANDNEGSEPARATIONRADIALUM_PCC_OBLIQUE POSANDNEGSEPARATIONTANGENTIALUM_PCC_OBLIQUE RPPMHAZEAVERAGE_PCC_OBLIQUE RPPMSIZE_PCC_OBLIQUE SIZE_PCC_OBLIQUE SN_RATIO_PCC_OBLIQUE XNEG_PCC_OBLIQUE XPOS_PCC_OBLIQUE YNEG_PCC_OBLIQUE YPOS_PCC_OBLIQUE DEFECTSIZENEGADC DEFECTSIZEPOSADC DEFECTSIZESHE LATERALEXTENTRADIALNEGUM LATERALEXTENTRADIALPOSUM LATERALEXTENTRADIALUM LATERALEXTENTTANGENTIALNEGUM LATERALEXTENTTANGENTIALPOSUM LATERALEXTENTTANGENTIALUM PCCADCRATIO PCCBCKGRNDINTENSITYADC PCCNUMCLUSTEREDDEFECTS POSANDNEGSEPARATIONRADIALUM POSANDNEGSEPARATIONTANGENTIALUM XNEG XPOS YNEG YPOS IMAGECOUNT IMAGELIST ;
DefectList
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2 48513.813 240323.265 0 0 0.000 0.000 0.000000 0.160 0 6 0 0 0 0 105033.476562 28919.916016 113975.234375 105033.476562 0 0 0 961.000000 966.000000 967.000000 0.604771 0.279645 0.347775 0.125819 0.030989 0.232329 3129 3129 3129 0 0 0 0.000000 0.000000 0.000000 0.000000 537.420837 537.420837 537.420837 270.579132 270.579132 270.579132 270.579132 0.102573 0.102573 0.102573 0.102573 0.015996 0.000000 0.000000 0.000000 0.028379 0.000000 0.000000 0.000000 21.221191 21.221191 21.221191 21.221191 0.000000 0.000000 0.000000 10.820578 2.622788 7.262303 10.820578 135.859268 138.330750 0.119900 0.030426 0.245198 6.927324 1.884316 6.739830 6.927324 0.160708 0.097546 1.102813 0.606980 0.088452 0.906772 0.550393 0.160708 1.647501 1.816885 20576.980469 8346.499023 47081.121094 20576.980469 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
3 33093.649 169451.783 0 0 0.000 0.000 0.000000 0.042 0 6 0 0 0 0 208.075806 208.075806 421.952515 424.726837 0 0 0 269.000000 274.000000 274.000000 1.000000 0.879947 0.870284 0.233002 0.028856 0.173845 6745 6745 6745 0 0 0 0.000000 0.000000 0.000000 0.000000 593.739319 593.730835 593.730835 34.260704 34.260704 34.269176 34.269176 0.063885 0.063885 0.063887 0.063887 0.001953 0.000000 0.000000 0.000000 0.003593 0.000000 0.000000 0.000000 2.469735 2.469735 2.470809 2.470809 0.000000 0.000000 0.000000 0.011897 0.011897 0.015058 0.019074 118.513573 170.553223 0.223964 0.028636 0.186136 0.013557 0.013557 0.024952 0.028012 0.042230 0.042230 1.462861 1.122681 0.028868 0.683592 0.767456 0.037615 0.890725 1.303007 46.719650 46.719650 204.014221 111.722145 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
4 176952.339 39884.008 0 0 0.000 0.000 0.000000 0.022 0 6 0 0 0 0 109.173752 19.666403 109.173752 44.627605 0 0 0 1043.000000 1048.000000 1049.000000 1.000000 0.903495 1.000000 0.093198 0.022457 0.189795 0 7610 0 0 0 0 0.000000 0.000000 0.000000 0.000000 467.600098 467.597260 467.597260 24.402729 24.399906 24.402729 24.402729 0.060156 0.060154 0.060156 0.060156 0.001391 0.000000 0.000000 0.000000 0.002559 0.000000 0.000000 0.000000 2.143502 2.142582 2.143502 2.143502 0.000000 0.000000 0.000000 0.003037 0.001111 0.003037 0.001824 113.366486 283.753510 0.088228 0.023267 0.202244 0.006456 0.001281 0.006456 0.002943 0.022102 0.028797 1.302906 1.161699 0.022102 0.767515 0.891622 0.024789 0.860808 1.121552 50.380177 7.334301 50.380177 12.069974 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
5 57832.196 171278.294 0 0 0.000 0.000 0.000000 0.038 0 6 0 0 0 0 111.969284 111.969284 607.227600 323.688477 0 0 0 701.000000 707.000000 707.000000 0.828031 0.851027 0.824127 0.207372 0.026723 0.188023 10766 10766 10766 0 0 0 0.000000 0.000000 0.000000 0.000000 584.194946 584.194031 584.194031 23.805038 23.805038 23.805981 23.805981 0.059882 0.059882 0.059882 0.059882 0.001357 0.000000 0.000000 0.000000 0.002497 0.000000 0.000000 0.000000 1.812847 1.812847 1.813015 1.813015 0.000000 0.000000 0.000000 0.006327 0.006327 0.021610 0.014126 94.592125 167.000183 0.199079 0.026847 0.200454 0.007296 0.007296 0.035908 0.021348 0.038182 0.038182 1.245210 1.071971 0.030663 0.803077 0.860876 0.035618 0.932861 1.161608 24.040808 24.040808 267.432617 77.960503 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
6 71505.610 102081.465 0 0 0.000 0.000 0.000000 0.020 0 6 0 0 0 0 71.615341 12.227010 71.615341 28.945574 0 0 0 86.000000 76.000000 76.000000 1.000000 0.813031 1.000000 0.212032 0.022457 0.269547 0 11219 0 0 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 -2.000000 -2.000000 -2.000000 -2.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.001965 0.000691 0.001965 0.001183 91.964966 211.402847 0.203603 0.023267 0.282783 0.004235 0.000797 0.004235 0.001909 0.020555 0.026639 1.296004 1.158675 0.020555 0.771603 0.894037 0.022991 0.863055 1.118522 31.573463 3.310964 31.573463 5.814979 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
7 109518.137 229473.000 0 0 0.000 0.000 0.000000 0.030 0 6 0 0 0 0 554.118225 49.076893 554.118225 72.363380 0 0 0 64.000000 69.000000 69.000000 0.846652 0.929441 0.735837 0.165430 0.045921 0.186251 0 11617 0 0 0 0 0.000000 0.000000 0.000000 0.000000 483.917175 483.923767 483.923767 36.076237 36.082825 36.076237 36.076237 0.064486 0.064489 0.064486 0.064486 0.002056 0.000000 0.000000 0.000000 0.003784 0.000000 0.000000 0.000000 2.903175 2.903963 2.903175 2.903175 0.000000 0.000000 0.000000 0.019734 0.002773 0.019734 0.002957 89.189346 116.993324 0.158358 0.042954 0.198664 0.032767 0.003198 0.032767 0.004773 0.030201 0.033424 1.106710 1.239115 0.030201 0.903579 1.119638 0.026974 0.807028 0.893146 248.645599 16.989939 248.645599 18.221203 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
8 101664.180 157404.530 0 0 0.000 0.000 0.000000 0.022 0 6 0 0 0 0 121.078331 17.819996 121.078331 29.293144 0 0 0 505.000000 506.000000 506.000000 1.000000 0.886506 0.697674 0.223682 0.024590 0.161439 0 16018 0 0 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 -2.000000 -2.000000 -2.000000 -2.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.003484 0.001007 0.003484 0.001197 48.899681 171.290619 0.214915 0.025057 0.173607 0.007160 0.001161 0.007160 0.001932 0.022615 0.028336 1.253015 1.229937 0.022615 0.798075 0.981582 0.023039 0.813050 1.018764 56.897388 3.878897 56.897388 7.837873 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0 0
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ProcessEquipmentIDList 1
  "None" ;
SummarySpec 5
  TESTNO    NDEFECT    DEFDENSITY    NDIE    NDEFDIE  ;
SummaryList
  4    0    0.0000000000e+00    1    1 
  6    11    1.5877784571e-02    1    1 
  7    11    1.5877784571e-02    1    1 
  8    4    5.7737398439e-03    1    1 
  9    4    5.7737398439e-03    1    1 
  13    11    1.5877784571e-02    1    1  ;
EndOfFile;